摘要 |
PURPOSE:To produce an ITO sintered compact excellent in thermal shock resistance, usable also as powder because it is easily crushed by hand, ensuring satisfactory work efficiency, excellent in utilization efficiency and capable of forming an ITO film having satisfactory specific resistance. CONSTITUTION:When powder consisting essentially of indium, tin and oxygen and so blended as to regulate the tin content of the resultant sintered compact to <20wt.% is compacted and sintered, grain size-regulating powder obtd. by heat-treating indium oxide powder and tin oxide powder is added to powdery starting material based on indium oxide powder and they are granulated, compacted and sintered. |