METHOD FOR FORMING MULTILAYER WIRING,申请号JP19940184433-传众专利搜索

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发明名称	METHOD FOR FORMING MULTILAYER WIRING
摘要
申请公布号	JPH0851148(A)	申请公布日期	1996.02.20
申请号	JP19940184433	申请日期	1994.08.05
申请人	MATSUSHITA ELECTRON CORP	发明人	KINOSHITA TAKASHI
分类号	H01L21/3205;H01L21/768;(IPC1-7):H01L21/768;H01L21/320	主分类号	H01L21/3205
代理机构		代理人
主权项
地址

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