ELECTRON BEAM EXPOSING METHOD,申请号JP19940185852-传众专利搜索

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发明名称	ELECTRON BEAM EXPOSING METHOD
摘要
申请公布号	JPH0851052(A)	申请公布日期	1996.02.20
申请号	JP19940185852	申请日期	1994.08.08
申请人	FUJITSU LTD	发明人	HIROZAWA TORU;SHIMABARA MASANORI
分类号	H01L21/027;(IPC1-7):H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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