| 摘要 |
PURPOSE:To stably form ink-jetting orifices having a high aspect ratio by providing a first solid layer to the periphery of an area becoming a liquid passage pattern and providing a second solid layer in a liquid passage pattern shape and subsequently removing the first solid layer and forming the obtained second solid layer into the liquid passage pattern. CONSTITUTION:In producing an ink jet recording head, at first, a negative resist 150 is applied to a substrate 100 to be baked at about 70 deg.C and subsequently exposed through a mask 155 to be developed to form a negative pattern 160. Next, a positive resist 200 is formed thereon and exposed through a mask 156 and developed to form a positive resist pattern. At this time, the negative resist pattern 160 is swollen and peeled simultaneously with development to obtain a recording head wherein the positive resist pattern 210 is formed into a liquid passage pattern shaped solid layer (second solid layer). |
