| 摘要 |
A test analysis apparatus for OBIC analysis and luminous analysis from a rear surface of a semiconductor wafer. According to the present invention, a semiconductor wafer is mounted on a wafer chuck and a probe card which has metallic needles and which is movable along the X, Y, and Z axes supplies a test pulse signal to respective electrode pads on the front surface of the semiconductor wafer. Then, current generated in the semiconductor wafer is detected at the electrode pads. Optical analysis, such as irradiation with a light beam, detection of reflected light, detection of light generated in the semiconductor wafer and the like, is performed from the rear side of the semiconductor wafer, thereby enabling analysis of a failure or a defect of a defective portion while the semiconductor wafer is in actual operating conditions.
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