| 摘要 |
A surface deformation light modulator contains a plurality of first electrodes arranged in a matrix of p rows and q columns affixed to a substrate by a suitable means. Each electrode is electrically connected to a third terminal of a respective switching element. Each switching element is affixed to a second face of the substrate. Each column of electrodes is overlapped by a respective flexible, reflective conductor. Each conductor is affixed by a suitable means to a first face of the substrate. Having the switch matrix and the conductors affixed to opposite face of the substrate allows several processing options to be considered to reduce the influence of contamination and hence enhancing the commercial viability of the modulator. Each switch element further includes a first switch terminal and a second switch terminal. Every second terminal in each row is electrically connected by a respective second buss. A plurality of first busses electrically connects every first terminal in each row to a common potential source. Every first buss is parallel to each second buss to avoid electrical crossover networks to enhance reliability. A suitable potential control means allows control of the potential difference between each first electrode and the respective conductor thereby enabling a wavefront incident on the modulator to be phase modulated in accordance with an information bearing signal.
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