PLASMA PROCESSING DEVICE,申请号JP19940202840-传众专利搜索

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发明名称	PLASMA PROCESSING DEVICE
摘要
申请公布号	JPH0850998(A)	申请公布日期	1996.02.20
申请号	JP19940202840	申请日期	1994.08.04
申请人	KOKUSAI ELECTRIC CO LTD	发明人	TAKAHASHI KIYOSHI;HAMANO KATSUTSUYA
分类号	H05H1/46;C23F4/00;H01L21/302;H01L21/3065;H01L21/31;(IPC1-7):H05H1/46;H01L21/306	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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