| 摘要 |
PURPOSE:To heat an object effectively and attain a high temp. while the electric power is saved, by furnishing a low emission rate layer on the surface opposite the heating surface. CONSTITUTION:A double-layer ceramic heater is prepared by laminating insulative layer and conductive layer, wherein the insulative layer is made of nitrides of silicon, aluminum, boron or oxides such as alumina, quartz, etc., while the conductive layer is made of a high melting point metal such as W, Pt, Ta or conductive ceramics such as SiC, carbon, etc. A low emission rate layer having a rate of emission below 0.2 is provided on the surface opposite the heating surface. The low emission rate layer is made of a high melting point metal such as W, Ta, Mo, Pt using such method as sputtering, EB evaporation, CVD, etc. Thereby the object can be heated effectively, and a high temp. be attained while the electric power is saved. |
