| 摘要 |
PURPOSE:To reduce erroneous detections by obtaining a binary flag image from comparison result between an image to be inspected separated from a first image including a plurality of patterns and a preliminarily stored reference image, and comparing a binary element image with a preliminarily stored reference element image. CONSTITUTION:A first processing part 10 reads out and stores data of an address where a flag of data memory of a storing/processing part 11 is esterblished, reference data in inspection mode. The processing part 10 compares data of an image to be inspected cut from a sliding window memory 8 sequentially with the stored reference image data, and outputs binary abnormal flag data as the comparison result to an abnormal flag-selecting device 12 in synchronization with the cutting of the image from the memory 8. An abnormal flag input to the device 12 is input to a frame buffer memory 13 synchronously with the cutting of the image from the memory 8. A second processing part 15 sequentially converts flag image data from the memory 13 into element data, thereby to judge the presence/absence of a defect. |
