| 摘要 |
<p>PURPOSE:To protect a wafer and the wafer holder of a semiconductor manufacturing apparatus from damages in a wafer transfer process. CONSTITUTION:The tip of a wafer holder 11 which sucks and holds a wafer 10 to transfer the wafer 10 is formed into a flat shape and into a circular arc shape in the thickness direction. Even if the tip of the wafer holder touches the wafer, the wafer slips along the circular arc shape of the tip of the holder 11, so that the wafer is not broken by the touch.</p> |
