| 摘要 |
PURPOSE:To prevent situation that insufficient contact at the time of exposing a mask film and a dry film causes faults such as short circuit called as exposure fogging because of the infiltration of light, and the remaining of copper or the deformation and the paint of various marks on a substrate, so that a hindrance is constituted in a post stage. CONSTITUTION:In this device, the substrate 1 is exposed in a state where it is interposed between a lower printing frame 4 and an upper printing frame 2, and a packing 3 whose upper surface is projected from the upper surface of the lower printing frame at ordinary times and whose height is varied is attached to the upper surface of the lower printing frame 4. By setting the height of the packing 3 larger at the time of starting the vacuum contact of both printing frames 4 and 2 and decreasing it as the contact progresses, the contact between them gradually extendes from the center to the peripheral part so as to obtain uniform contact. |
