| 摘要 |
PURPOSE:To prevent treatment liquid from re-sticking to the surface of a workpiece by applying the treatment liquid to the surface of the workpiece rotating in a cup, and guiding the liquid scattered around the workpiece downward by centrifugal force. CONSTITUTION:In a scrubber a workpiece W is rotated in a cup 27 by means of a spin chuck 26, and rinsing liquid is applied through rinsing nozzles 41, 41. Thus the rinsing liquid is scattered around the workpiece W by centrifugal force. The drops of the rinsing liquid are flown from the peripheral portion of the workpiece W in the directions of rotational tangents. The drops are brought into contact with the back sides 63 of stationary blades 60, placed inside the cup 27, and then forcedly guided in the direction marked with '64'. Thus the drops move downward inside the cup 27. This efficiently prevents the occurrence of circulating flows in the cup without any additional exhaust pump or the like. |
