MANUFACTURE OF MULTILAYERED PIEZOELECTRIC ACTUATOR ELEMENT

摘要

PURPOSE:To provide a manufacturing method of a multilayered piezoelectric actuator element baked in a unified body wherein production efficiency in a laminating process is improved, and delamination or deformation in a sinterning process is reduced. CONSTITUTION:In the manufacturing method of a multilayered piezoelectric actuator element wherein an active part in which green sheets of piezoelectric ceramics and inner electrodes are alternately laminated and an inert part in which inner electrodes are not included are collectively backed, the inert part is manufactured by pressure-molding the powder which is obtained by crushing a green sheet of piezoelectric ceramics.