| 摘要 |
PURPOSE: To provide a device for measuring acceleration by use of a micromechanical element. CONSTITUTION: One or more acceleration elements 10 are used, each element has a mass 12 suspended by a hinge 13 flexible on both ends thereof. The mass 12 can be deflected in first and second rotating directions around the axial line in reply to acceleration. Further, each element 10 has an electrode 15 capable of working so as to sense the deflection of the mass 12 when the mass 12 is deflected in either direction. Detecting circuits 25, 65, 125 operate in different forms according to whether the deflection is of contact type, non-contact type, or feedback type. |
