| 摘要 |
<p>PURPOSE:To provide alignment marks, without occupying chip regions, by forming the alignment marks on other blank regions of the chip regions than the main body of chip among many chip regions arranged in all directions. CONSTITUTION:A chip region 20 is composed of an essential chip part 21 and blank region 22 at the periphery of the chip part. In respect of the region 22, alignment marks 23 are previously formed on a semiconductor wafer 12. A photomask is provided with alignment marks composed of light screens at regions facing the marks 23 on the lower face of the mask. Thus, the alignment marks does not occupy the chip region and hence more chips can be produced from one semiconductor wafer.</p> |
