ELECTRON EMISSION ELEMENT, ELECTRON SOURCE AND IMAGE FORMING DEVICE USING THIS SOURCE AND THEIR MANUFACTURE

摘要

PURPOSE:To provide a manufacturing method of a surface conductive electron emission element used as an electron source for an image forming device or the like. CONSTITUTION:An electron emission section 2 made by a forming process is provided on a conductive thin film 3 for communication between electrodes 4 and 5 laid on a substrate 1. In this case, the forming process is undertaken by the application of pulse voltage where voltage V(t) over time (t) after voltage application is proportional to -1/4 except for the time immediately after application. As a result, the temperature of the thin film 3 does not continue to rise and the occurrence of an element defect can be prevented. Also, the dispersion of characteristics between each element can be reduced in the case of concurrently forming many elements.