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发明名称
CARBON SLIT PLATE FOR CHARGED PARTICLE BEAM RESISTANCE
摘要
申请公布号
JPH0845467(A)
申请公布日期
1996.02.16
申请号
JP19940178997
申请日期
1994.07.29
申请人
TOSHIBA DENKO KK;AKUROSU:KK
发明人
YAMAZAKI HIROSHI;UCHIDA TAKESHI;NAKAGAWA TAKAO;TACHIBANA MASAHARU;YAMASHITA MIHOKO
分类号
C23C14/48;H01J37/317;H01L21/265;(IPC1-7):H01J37/317
主分类号
C23C14/48
代理机构
代理人
主权项
地址
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