ULPA FILTER

摘要

An improved filter unit suitable for use in a variety of clean air filtration applications is taught. The filter unit employs continuous microporous filtration membranes, such as expanded polytetrafluoroethylene, to deliver exceptional filtration efficiencies on the order of 99.99999 % at 0.1 mu with minimal pressure drop produced across the filter. Additionally, the filter unit of the present invention has the further advantage of avoiding many previous deficiencies in HEPA and ULPA filter units, such as filter contamination from shedding particles and/or out-gassing, and limitations on chemicals to which the filter can be exposed without deterioration. As a result, the present invention provides a cleaner and more durable filter that can be used to address growing contamination problems in many different industries, such as electronics and pharmaceuticals.