| 摘要 |
<p>Hydride gas removing method and apparatus which are capable of detoxifying a mixed gas by completely removing various hydride gases therefrom by using a simple structure without generating pulverized bodies which would cause the clogging of the apparatus. The method is characterized in that a mixed gas containing at least two kinds of hydride gases is brought into contact with nickel fluoride and nickel to subject the hydride gases to decomposition or/and adsorption, whereby the hydride gases are removed. The method is also characterized in that a gas of a hydride of a group III or V element in the periodic table is removed by bringing the gas into contact with nickel so as to subject the gas to decomposition or/and adsorption, whereby the hydride gas is removed.</p> |
