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发明名称
Verfahren zur Regelung des Reaktionsgrades sowie Beschichtungsanlage.
摘要
申请公布号
CH686253(A5)
申请公布日期
1996.02.15
申请号
CH19920002689
申请日期
1992.08.28
申请人
BALZERS AKTIENGESELLSCHAFT
发明人
BERGMANN, ERICH, DR.-PHYS.
分类号
C23C14/34;C23C14/00;C23C14/54;(IPC1-7):C23C14/54
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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