<p>Silacyclohexane compounds of formula <CHEM> are selectively prepared by converting diarylsilacyclohexane compounds of formula <CHEM> wherein Ar and Ar' independently represent a phenyl group or a tolyl group, and Q is a group of the following type <CHEM> to the corresponding dihalosilacyclohexanes and then to hydrohalosilacyclohexanes, either directly or via dialkoxylation and/or a reduction step, followed by treatment with an organometallic compound Q'-M wherein, Q' is a group of the type <CHEM> and M is MgP or ZnP wherein P is a halogen.r</p>