LEAKAGE INSPECTING METHOD OF MASS FLOW CONTROLLER

摘要

The method for checking leakage of a mass flow controller comprises the steps of covering an output opening of an MFC with a terminal cap and initializing all values; setting a minimum range of a mass flow meter; converting a digital value which can completely open a mass flow controller into an analog value and outputting it to the mass flow controller; converting the flow value of the minimum range mass flow meter into a digital value and applying it to a computer via a data bus; calculating the digital value input to the computer in terms of a percentage and outputting it as a graphic on a monitor; and operating according to the scale corresponding to the upper limit value and lower limit value of the graphic and drawing a curve corresponding to a percentage.