SILICON NITRIDE SINTERED PRODUCT AND METHOD FOR PRODUCING THE SAME

摘要

PURPOSE:To obtain a silicon nitride sintered product high in mechanical strength and not containing pores and residual silicon which are the defects of a silicon nitride sintered product using silicon as a raw material. CONSTITUTION:The silicon nitride sintered product contains >=0.02wt.% of Fe. Fe compound particles having particle diameters of >=0.5mum and contained in the silicon nitride sintered product occupies an area of >=0.1% in a two-dimensional range of 200X200mum, and also occupies an area of <=15% in a cell obtained by dividing the two-dimensional area of 200X200mum into longitudinal and lateral 20 equal divisions (10mumX10mum unit, 400 cells).