| 发明名称 |
Photomask or a light shielding member having a light transmitting portion and a light shielding portion |
| 摘要 |
A photomask or a light-shielding member has a support capable of transmitting light, a light-shielding pattern which shields the light and a light absorbing member provided corresponding to the light-shielding pattern. In one aspect, the light-shielding pattern and the light absorbing member are provided on the same side of the support. In another aspect, the light-shielding pattern and the light absorbing member are provided with the support sandwiched therebetween.
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| 申请公布号 |
US5490896(A) |
申请公布日期 |
1996.02.13 |
| 申请号 |
US19950395472 |
申请日期 |
1995.02.28 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
YAGI, TAKAYUKI;KOMATSU, TOSHIYUKI;SATO, YASUE;KAWATE, SHINICHI |
| 分类号 |
G03F1/08;G03F1/14;G03F7/16;G03F7/20;H01L21/308;H01L21/311;H01L21/3213;(IPC1-7):H01L21/306;B44C1/22 |
主分类号 |
G03F1/08 |
| 代理机构 |
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