摘要 |
PURPOSE:To provide an aluminum nitride ceramic high in thermal conductivity and having a high strength. CONSTITUTION:100 pts.wt. of aluminum nitride powder having an oxygen content of <=1.3wt.%, 0.1-20 pts.wt. of carbon, 0.3-50 pts.wt. of aluminum oxide, 0.01-15 pts.wt. of yttrium oxide, and, if necessary, further a binder, a dispersant, etc., are mixed and molded. In the mixture, the carbon is added in an amount which is more excessive than a chemical equivalent required for the reaction with oxygen contained in the aluminum nitride powder. The aluminum oxide is added for reacting with the excessive carbon. The obtained molded product is sintered to obtain the aluminum nitride ceramic having a thermal conductivity of >=180(W/m.k) at 25 deg.C. |