| 摘要 |
PURPOSE:To produce a high-purity and high-density alumina ceramic excellent in uniformity and useful especially for a member of a semiconductor production apparatus. CONSTITUTION:This is a method for production of sintered alumina. This production method is composed of (1) a molding process for molding a powdery alumina raw material, (2) a primary calcination process for calcining the resultant alumina molding prepared by the molding process while removing the organic binder therefrom without reducing the open pores, (3) a heat treatment process for heat treating the obtained primary calcined material in an atmosphere of a hydrogen chloride-containing gas and (4) a sintering process for sintering it by further firing it after the heat treatment process. |
