发明名称 POLISHING COMPOSITION AND POLISHING METHOD
摘要 PURPOSE:To provide a polishing composition which can increase the polishing speed and delay the deterioration of the polishing agent in the scratch-free mirror surface polish. CONSTITUTION:This polishing composition comprises 2-30 pts.wt. of a polishing material of 0.1-10mum average particle diameter and 1-20 pts.wt. of at least one selected from the group consisting of alkyl sulfate salts and polyoxyethylene monofatty acid esters. The substrate is polished on its surface, as the buff having the polishing composition adhered on its surface is rotated.
申请公布号 JPH0841443(A) 申请公布日期 1996.02.13
申请号 JP19940174058 申请日期 1994.07.26
申请人 OKUNO CHEM IND CO LTD 发明人 KATAKAMA TOSHIO;OZEKI NORIO;NISHIHAMA YUKIO
分类号 B24B37/00;C09K3/14 主分类号 B24B37/00
代理机构 代理人
主权项
地址