发明名称 High resolution imaging and measuring dynamic surface effects of substrate surfaces
摘要 Methods of high resolution imaging and measuring dynamic surface effects of substrate surfaces is provided. The present invention utilizes electronic scanning with multiple scanning tunneling microscope (STM) tunnel-effect probes on an array that is stationary relative to the substrate surface. A high resolution image of the substrate surface is obtained by positioning an array of STM probes stationary relative to the substrate surface during the scanning process, selecting spatial points at which probes of the array of STM probes are to be activated, selecting times at which the selected STM probes are to be activated, activating the selected STM probes at the selected times, and measuring tunneling currents between the selected STM probes and the substrate.
申请公布号 US5491338(A) 申请公布日期 1996.02.13
申请号 US19930045563 申请日期 1993.04.09
申请人 SPITZER, RICHARD 发明人 SPITZER, RICHARD
分类号 G01R33/09;G01Q60/16;G01Q80/00;G01R33/10;G11B5/00;G11B5/02;G11B5/09;G11B5/127;G11B5/35;G11B5/37;G11B5/39;G11B5/49;G11B9/00;G11B9/14;G11B19/02;G11B20/10;G11B21/00;G11C11/14;G11C11/21;G11C13/02;(IPC1-7):H01J37/00 主分类号 G01R33/09
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