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发明名称
Integrated circuit manufacturing
摘要
申请公布号
SG24106(A1)
申请公布日期
1996.02.10
申请号
SG19950000121
申请日期
1995.03.17
申请人
AT&T CORP
发明人
OBENG YAW SAMUEL
分类号
C11D7/26;G03F7/42;H01L21/304;H01L21/311;(IPC1-7):B44C1/22;H01L21/312
主分类号
C11D7/26
代理机构
代理人
主权项
地址
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