Microwave plasma systems,申请号GB19950024898-传众专利搜索

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发明名称	Microwave plasma systems
摘要
申请公布号	GB9524898(D0)	申请公布日期	1996.02.07
申请号	GB19950024898	申请日期	1995.12.05
申请人	APPLIED SCIENCE AND TECHNOLOGY INC	发明人
分类号	H05H1/28;C23C16/50;C23C16/511;C23F4/00;H01L21/205;H01L21/302;H01L21/3065;H01L21/31;H05H1/46	主分类号	H05H1/28
代理机构		代理人
主权项
地址

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