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发明名称
METHOD AND APPARATUS FOR PROCESS CONTROL
摘要
申请公布号
EP0695438(A1)
申请公布日期
1996.02.07
申请号
EP19940911284
申请日期
1994.04.05
申请人
NIMBUS COMMUNICATIONS INTERNATIONAL LIMITED
发明人
REYNOLDS, GERALD, ALFRED, JOHN;HALLIDAY, JONATHAN
分类号
G01N21/88;G01B11/30;G01N21/95;G03F7/30;G11B7/26;(IPC1-7):G03F7/30;G01N21/89
主分类号
G01N21/88
代理机构
代理人
主权项
地址
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