发明名称 |
FLUID TREATMENT APPARATUS AND METHOD |
摘要 |
A new apparatus for treating substrates with fluids, as well as a corresponding fluid treatment method, is disclosed. The new apparatus includes a new configuration of fluid jet injectors which substantially overcomes the problem of dragout, in which fluid impinged upon an area of a substrate is retained on that area, preventing fresh fluid from reaching the impinged area. This new configuration also avoids imposing torques on substrates, and substantially reduces the need for rollers and guides for transporting substrates.
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申请公布号 |
CA2091909(C) |
申请公布日期 |
1996.02.06 |
申请号 |
CA19932091909 |
申请日期 |
1993.03.18 |
申请人 |
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发明人 |
BARD, STEVEN LINDZ;JONES, JEFFREY DONALD;KATYL, ROBERT HENRY;MOORE, RONALD JAMES;MORENO, OSCAR AUREO |
分类号 |
B05C5/02;B05D1/36;B08B3/02;C23F1/08;F26B21/00;H01L21/304;H05K3/00;H05K3/22;H05K3/26;(IPC1-7):H05K3/00 |
主分类号 |
B05C5/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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