摘要 |
PURPOSE:To achieve the measurement of an angular velocity of rotation accurately free from variations in characteristic and changes in time and temperature by improving a detection sensitivity using piezoelectric elements with charracteristics thereof difference in the use for driving and for detection. CONSTITUTION:Piezoelectric elements for driving 12a, for detection 12b and 12b and for feedback 12c are mounted on the side of a regular square pole shaped vibrator. The piezoelectric element for driving 12a is made of piezoelectric ceramics to be large in the amplitude of vibration and the piezoelectric elements for detection 12b and 12b are made as crystal type with different characteristics to detect a detection signal at a high sensitivity. The detection signal is detected efficiently with load resistances 15a and 15b and impedance conversion circuits 16a and 16b thereby stabilizing an output against changes in the temperature and time. |