| 摘要 |
<p>PURPOSE:To simplify the mounting and demounting of a semiconductor in a semiconductor manufacturing equipment in the case that one and the same semiconductor manufacturing equipment is used for many kinds of products. CONSTITUTION:In a jig for manufacturing a semiconductor which is constituted of a stage 5 which has positioning pins 6 at desired places, a pocket 1 which has a positioning hole 3 and a cutout 4 at desired places and which has a holding section 2 for a semiconductor device on a principal plane, and fixing means such as magnets 7 for fixing the stage 5 and the pocket 1, the positioning pins of the stage are set in the positioning hole and the cutout and then the pocket is mounted and fixed on the stage by means of the magnets. Due to this structure, the jig can be replaced easily when it is being used in a semiconductor manufacturing equipment which is used for many kinds of semiconductor devices and therefore the workability is remarkably increased.</p> |
