| 摘要 |
PURPOSE:To produce a low-floating slider for high-density magnetic recording with high production yield by using Al2O3-TiCxOyNz substrate material for a magnetic head, controlling the proportion of structural components, uniform dispersion state, and particle size of grains, and annealing the material after sintering. CONSTITUTION:This material has the compsn. of 24-75mol% alpha-Al2O3 and the balance of 76-25mol% TiCxOyNz as an average compsn. range having a Nail crystalline structure (W x, y, z satisfy 0.5<=x<=0.995, 0.005<=y<=0.30, 0<=z<=0.2, 0.505<=x+y+z<=1). The material may contain <=2mol% TiOn (n<2). The material may contain a minute component including at least one of MgO, CaO, ZrO2 and Cr2O3 by <0.8mol% and at least one of rare earth oxides of Y, Ce, Eu, Dy, Yb or the like by <0.4mol% in the total 0 to 0.8 mold. These components for the source material are mixed, pulverized in a wet state into particles of <=1.5mum average particle size and <=3mum max. size, dried, compacted and sintered. Then after sintering, the sintered body is annealed at 1200-1700 deg.C for 15min to 10 hours to obtain the substrate material. |
