发明名称 METHOD OF PRESERVING MAPPING DATA OF SEMICONDUCTOR WAFER
摘要 <p>PURPOSE:To provide a method of preserving a mapping data of a semiconductor wafer capable of evading a reduction in a manufacturing yield due to scattering of aluminum without using an external memory medium and further detecting a stable mark. CONSTITUTION:A mapping data and an address reference mark being an arrangement data of acceptable and defective semiconductor chips within a semiconductor wafer 20 are printed in a labeled tape 30 and sticked to within the semiconductor wafer 20, whereby the mapping data and address reference mark of acceptable and defective semiconductor chips are formed within the same semiconductor wafer.</p>
申请公布号 JPH0837210(A) 申请公布日期 1996.02.06
申请号 JP19940170613 申请日期 1994.07.22
申请人 NEC KYUSHU LTD 发明人 NISHIMURA KATSUHIRO
分类号 G01R31/26;H01L21/02;H01L21/66;H01L23/544;(IPC1-7):H01L21/66 主分类号 G01R31/26
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