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经营范围
发明名称
WAFER PLATING APPARATUS
摘要
申请公布号
JPH0837189(A)
申请公布日期
1996.02.06
申请号
JP19940169878
申请日期
1994.07.22
申请人
MATSUSHITA ELECTRON CORP
发明人
TETANI MICHINARI;MATSUMURA TAKASHI
分类号
C25D7/12;H01L21/321;H01L21/60;(IPC1-7):H01L21/321
主分类号
C25D7/12
代理机构
代理人
主权项
地址
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