| 摘要 |
A treatment chamber(101) is formed by combining a setter body(1) and a cover(14) to square tube shape. The setter body(1), which has a cover joining means arranged on circumference of inlet(2) of the treatment chamber, comprises a main member(1a) having a connecting flange(1') formed at the outside, a connecting member(1b) having two connecting flanges(1") formed at both edge sides, and a closing member(1c) being closed to outside and having a connecting flange(1'") at inside, and the connecting flanges are connected with together by fastening with bolt and nut. A packing(22) and a support piece(3) having a guide hole(3a) are mounted in the inlet(2) of the treatment chamber, and cover combining elements(4) having a inserting grooves(5) and a hanging projections(6) are mounted at the outside of the support piece(3), and are operated to be fastened by operation pieces(7) and bolts(7) installed at the insides of the support piece(3). The operation pieces(7) open or close simultaneously the cover combining elements.
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