CVD APPARATUS AND FILM FORMATION USING CVD APPARATUS,申请号JP19940191177-传众专利搜索

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发明名称	CVD APPARATUS AND FILM FORMATION USING CVD APPARATUS
摘要
申请公布号	JPH0835068(A)	申请公布日期	1996.02.06
申请号	JP19940191177	申请日期	1994.07.20
申请人	IWASAKI ELECTRIC CO LTD	发明人	HORIKOSHI SOICHIRO
分类号	C23C16/44;C23C16/455;C23C16/458;(IPC1-7):C23C16/44	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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