METHOD OF CLEANING SURFACE OF COMPOUND SEMICONDUCTOR SINGLE CRYSTAL AND ETCHING SOLUTION,申请号JP19940192748-传众专利搜索

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发明名称	METHOD OF CLEANING SURFACE OF COMPOUND SEMICONDUCTOR SINGLE CRYSTAL AND ETCHING SOLUTION
摘要
申请公布号	JPH0834700(A)	申请公布日期	1996.02.06
申请号	JP19940192748	申请日期	1994.07.26
申请人	SUMITOMO ELECTRIC IND LTD	发明人	YAMADA TAKASHI
分类号	C30B29/48;C30B33/10;H01L21/304;H01L21/308;(IPC1-7):C30B33/10	主分类号	C30B29/48
代理机构		代理人
主权项
地址

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