| 摘要 |
<p>PURPOSE:To obtain a vacuum chucking mechanism which strongly chucks a disk by preventing air leakage to a disk having infinitesimal radious difference or chucking surface in which infinitesimal working error exists in radious. CONSTITUTION:Two support plates 71a, 71b having arclike oblique surfaces S1, S2 along outer periphery 1a of a disk 1 and a spacer 72 inserted to parts except the surfaces S1, S2 of the periphery are superposed, and the peripheries are clamped together by a bolt 73. Both the surfaces S1, S2 are formed as chucking surfaces K to chamfers CH1, CH2 of the periphery 1a, and a regulating screw 75 for regulating the interval between both the surfaces S1 and S2 is provided at the center of the left and right surfaces S1 and S2.</p> |
