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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH0835064(A)
申请公布日期
1996.02.06
申请号
JP19940167800
申请日期
1994.07.20
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
YAMANISHI HITOSHI;AOKURA ISAMU;YOKOYAMA MASAHIDE;TAKIZAWA TAKAHIRO
分类号
C23C14/34;C23C14/35;H01J37/34;H01L21/203;(IPC1-7):C23C14/35
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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