| 摘要 |
<p>PURPOSE:To provide a thermal head simple in process, keeping characteristics of low power consumption and high reliability and enhanced in pulse-resistant life. CONSTITUTION:Electrodes 3, 3' are formed on the surface of a silicon substrate 1 and covered with a resistor. A heating part 2 is a part having no conductor under the resistor. The resistor is composed of metal nitride and the surface thereof is subjected to anodic oxidation and the diffusion of oxygen from the anodic oxidation film is suppressed by the resistor composed of metal nitride.</p> |
