| 摘要 |
PURPOSE:To provide a device and method for inspecting appearance capable of improving inspection reliability by judging whether an inspection element pattern, which is detected as a defective candidate, is defective or not, and then judging a defect which can be rescued to be normal. CONSTITUTION:The device is provided with a means 11 for detecting the defect of a target 13 to be inspected from image data DIN and a means 12 for judging whether the defect detected by the detection means 11 is an allowable defect or a true defect. The judgment means 12 enlarges the inspection element pattern of the target 13 to be inspected which is extracted from the image data DIN and is provided with a first labeling circuit 22A for labeling for each inspection element pattern, a second labeling circuit 22B for labeling for each inspection element pattern of the target 13 to be inspected excluding the defect from the image data DIN, and a region judgment circuit 22C for comparing a label output signal S1 from the labeling circuit 22A with a label output signal S2 from the labeling circuit 22B and then judging whether the defect occurred in a defective region. |
