| 摘要 |
PURPOSE:To enable positioning without positional deviation caused between image data even when the line width thereof is different. CONSTITUTION:A pattern covering the ends of a reference image data 1 and an inspection image data 2 is cut off with an image cut-out section 18 while a pattern having an edge is cut out. The positions of the centers of gravity of the image data cut-out are calculated with a center of gravity calculating section 19. Then, a positional deviation value between the image data 1 and 2 is detected with a positional deviation value detecting section 20 from the positions of the centers of gravity to correct the positions of the image data 1 and 2 with a position correcting section 21 based on the positional deviation values. |
