METHOD FOR CORRECTING WORK POSITION DEVIATION BY SURFACE DEFECT INSPECTION DEVICE

摘要

PURPOSE:To easily and accurately detect the amount of position deviation of a work for correction. CONSTITUTION:The position data of five reference parts P0-P4 including three parts which are not on the same straight line where contrast can be maximized when applying light out of the surface of a body 12 are obtained by a twodimensional sensor. Then, teaching data are corrected so that the position data of reference parts P0-P2 on teaching are set as the position data obtained by the two-dimensional sensor.