| 摘要 |
PURPOSE:To eliminate the trouble such as the generation of damage and the adhesion of dust, and to eliminate the trouble that the mask is easy to be broken so as to facilitate the handling thereof by adhering a tape for spacer to the whole surface of a metal thin plate, which is provided with cutting pattern parts formed into the predetermined mask pattern, along the cutting pattern parts, and fitting a support for supporting the metal thin plate to the surface opposite to the tape adhered surface. CONSTITUTION:A tape 13 for spacer is adhered to the whole surface of a metal thin plate 11, which is provided with cutting pattern parts 12 formed into the predetermined mask pattern, along the cutting pattern parts 12. A support for supporting the metal thin plate 11 is fitted to the surface opposite to the surface, to which the tape 13 for spacer is adhered. At the time of superposing an exposing mask A on the photosensitive resin film 17 of a substrate 16 and adhering them to each other for pattern exposure, the tape 13 forms a clearance 18 at a thickness of the tape 13 between the superposed surfaces. With this structure, at the time of peeling is the mask A from the photosensitive resin film 16 surface, peeling is facilitated by this clearance 18. |
