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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0831935(A)
申请公布日期
1996.02.02
申请号
JP19940161153
申请日期
1994.07.13
申请人
NKK CORP
发明人
TATEISHI MASAHIRO;TAKAHASHI TAKAO
分类号
H01L21/285;H01L21/768;(IPC1-7):H01L21/768
主分类号
H01L21/285
代理机构
代理人
主权项
地址
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