DETECTOR FOR PARTICLE PROCESSING APPARATUS,申请号JP19940160815-传众专利搜索

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发明名称	DETECTOR FOR PARTICLE PROCESSING APPARATUS
摘要
申请公布号	JPH0829316(A)	申请公布日期	1996.02.02
申请号	JP19940160815	申请日期	1994.07.13
申请人	PAURETSUKU:KK;KYOTO FUNTAI GIJUTSU KENKYUSHO:KK	发明人	FUNAKOSHI YOSHIRO;SAKAMOTO HEIJI;KURIHARA TAMOTSU;MITSUKI ISATO;KONISHI MASASHI
分类号	G01N15/00;B01J2/00;B01J2/16;G01N15/10;(IPC1-7):G01N15/00	主分类号	G01N15/00
代理机构		代理人
主权项
地址

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