MULTILAYER WIRING BOARD, ITS PRODUCTION AND PRODUCTION OF SINTERED SILICA USED FOR IT

摘要

PURPOSE:To realize low permittivity and low dielectric loss factor by a constitution wherein the insulating layer contains the sintered silica by a predetermined ratio or more and the conductor layer is composed of a conductive material having melting point within a specified range. CONSTITUTION:An insulating layer contains 95wt.% or more of sintered silica 1 and a conductor layer is composed of a conductor having melting point in the range of 800-1200 deg.C. The sintered silica 1 contains 50wt.% or more of amorphous silica. The sintered silica 1 is produced by mixing fine powder of silica having average particle size of 5-500nm with a binder and a solvent to produce a slurry and then firing a formed slurry at 800-1200 deg.C in an atmosphere containing steam in the range of 0.005-0.85 atm by partial pressure. Alternatively, fine powder of silica having average particle size of 5-500nm is pressed and fired at 800-1200 deg.C in an atmosphere contained steam in the range of 0.005-0.85 atm by partial pressure.